Mechanical Characterization of Released Thin Films by Contact Loading
نویسندگان
چکیده
منابع مشابه
Mechanical Characterization of Released Thin Films by Contact Loading
The design of reliable micro electro-mechanical systems (MEMS) requires understanding of material properties of devices, especially for free-standing thin structures such as membranes, bridges, and cantilevers. The desired characterization system for obtaining mechanical properties of active materials often requires load control. However, there is no such device among the currently available to...
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ژورنال
عنوان ژورنال: Journal of Applied Mechanics
سال: 2006
ISSN: 0021-8936
DOI: 10.1115/1.2166652